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China starts production of home-grown immersion DUV chipmaking tools

  • Posted on July 28, 2026
  • By Google News
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  • 1 min read
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China starts production of home-grown immersion DUV chipmaking tools
China starts production of home-grown immersion DUV chipmaking tools

China has begun mass producing domestically developed immersion deep-ultraviolet (DUV) lithography machines, ​a technology crucial to advanced chipmaking, a person familiar with the matter said, marking a key step forward in Beijing's drive to reduce its reliance ‌on foreign technologies.
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